| Specification | Analog | Digital |
| Flow Range | 800SLPM | 2000SLPM |
| Response Time | 1-2s | |
| Pressure Range | 1Mpa,4Mpa,10Mpa,100Mpa | |
| Power Supply | 12,15,18 or 24V | |
| Control Signal | 0-5VDC,1-5VDC,or 4-20mA | |
| Digital Signal | RS-232,485 profitbus,devicenet | |
| Operating Temperature | -10-70℃ | |