| Specification | Analog/Digital | |
| Flow Range | 20SLPM(This SeriesMainly Used ForEnvironmental Equipment) | |
| Accuracy | 1% | ± 0.5 % Rd±0.1% FS |
| Repeatability | ± 0.15%F.S | |
| Response Time | less than 1S | |
| Pressure Range | 100Kpa | |
| Leakage Rate | 1×10-9 SCCM(He) | |
| Supply Voltage | ±15VDC; | |
| Power Supply | 4 Watts Maximum | |
| Control Signal | 0-5 VDC | |
| Digital Signal | RS-232/485,Profitbus,Devicenet | |
| Output Signal | 0-5 VDC | |
