Specification | Analog/Digital | |
Flow Range | 10SLPM(In the rang of 10SCCM-10SLPM,You can specify any point range calibration) | |
Accuracy | 1% | ±0.5 % Rd±0.1% FS |
Repeatability | ±0.15%F.S | |
Response Time | Less than 1S | |
Pressure Range | 1Mpa,2Mpa,3Mpa,10Mpa | |
Leakage Rate | 1×10-9 SCCM(He) | |
Supply Voltage | ±15VDC; | |
Power Supply | 4 Watts Maximum | |
Control Signal | 0-5 VDC | |
Digital Signal | RS-232/485,Profitbus,Devicenet | |
Output Signal | 0-5 VDC |